High Pressure Gas Analyzers   QMS100, QMS200 and QMS300

*Related Products* PPR Vacuum Process Monitoring Systems RGA Residual Gas Analyzers

	Specifications
	Inlet
	Type	Capillary available in stainless steel, and PEEK
	Flowrate	1 to 10 milliliter per minute at atmospheric pressure
	Pressure	10 mbar to greater than 1 bar (depending on capillary)
	Mass Spectrometer
	Type	Quadrupole
	Detector	Faraday cup and electron multiplier
	Range	100, 200 or 300 atomic mass units (amu)
	Resolution	Better than 0.5 amu at 10 % of peak height
	Detection limit	Less than 1 ppm
	Operating pressure	5 × 10-6 mbar
	Connections
	Inlet	1/4' Ultra-Torr® fitting
	Computer interface	RS-232C, 28800 baud, DB9 connector
	Software	RGA Windows application
	System
	High vacuum pump	Hybrid turbo-molecular
	Diaphragm pump	Advanced low pressure
	Materials
	Construction	SS304 and SS316
	Insulators	Alumina, ceramic
	Seals	Viton®, buna-N, and nitrile butyl rubber
	Miscellaneous	Aluminum, Tygon®
	General
	Startup time	5 minutes from full stop
	Max. ambient temp.	35 °C
	Power requirement	110 VAC @ 60 Hz or 220 VAC @ 50 Hz (not field selectable)
	Dimensions	8.0' × 17.0' × 24.0' (WHL)
	Weight	75 lbs.
	Warranty	One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.