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RGA系列残余气体分析仪  


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产品型号:RGA系列
厂商名称:美国斯坦福研究系统
商品名称:RGA系列残余气体分析仪            
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  RGA残余气体分析仪 RGA100\RGA200\RGA300

Specifications

Operational

 

 

Mass range

 

     RGA100

1 to 100 amu

     RGA200

1 to 200 amu

     RGA300

1 to 300 amu

Mass filter type

Quadrupole

Detector type

Faraday cup (FC)—standard, electron multiplier (EM)—optional

Resolution

Better than 0.5 amu @ 10 % peak height (per AVS std. 2.3). Adjustable to constant peak width throughout the mass range.

Sensitivity (A/Torr)

2 × 10-4 (FC), <200 (EM). User adjustable throughout high voltage range. Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current.

Minimum detectable partial pressure

5 × 10-11 Torr (FC). 5 × 10-14 Torr (EM). Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy , 12 eV ion energy, and 1 mA electron emission current.

Operating pressure

10-4 Torr to UHV (FC)
10
-6 Torr to UHV (EM)

Max. operating temp.

70 °C

Bakeout temperature

300 °C (without ECU)

Ionizer

Design

Open ion source, cylindrical symmetry, electron impact ionization.

Material

SS304 construction

Filament

Thoriated-iridium (dual) with firmware protection. Built-in 1 to 10 W degas ramp-up. Field replaceable.

Electron energy

25 to 105 V, programmable

Ion energy

8 or 12 V, programmable

Focus voltage

0 to 150 V, programmable

Electron emission current

0 to 3.5 mA, programmable

General

Probe dimension

8.75' from flange face to top of ionizer

Probe insertion

2.0'

Probe mounting flange

2.75' CF

Minimum tube I.D.

1.375'

ECU dimensions

9.1' ×4.1' × 3.1' (WHL) Easily separated from the probe for bakeout.

LED indicators

Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF, RS-232 Busy, Error, Overpressure, Burnt Filament.

Warm-up time

Mass stability ±0.1 amu after 30 minutes

Computer interface

RS-232C, 28,800 baud with high-level command set

Software

Windows based application

Power requirement

24 VDC @ 2.5 amps. Male DB9 connector. Optional 110/120/220/240 VAC adapter.

Weight

6 lbs.

Warranty

One year parts and labor on defects in materials and workmanship

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残余气体分析仪